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Fundamentals of Semiconductor Fabrication May, Gary S. (School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, Georgia)
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Fundamentals of Semiconductor Fabrication
May, Gary S. (School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, Georgia)
From crystal growth to integrated devices and circuits, this new book offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence.
320 pages, Illustrations
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | March 28, 2003 |
| Original release date | 2007 |
| ISBN13 | 9780471232797 |
| Publishers | John Wiley & Sons Inc |
| Pages | 320 |
| Dimensions | 184 × 261 × 19 mm · 544 g |
| Language | English |
