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Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set Madou, Marc J. (University of California, Irvine, USA) 3rd edition
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Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set
Madou, Marc J. (University of California, Irvine, USA)
Offers a complete MEMS and NEMS reference. Discussing a variety of approaches, this title includes developments in design packages, DNA and protein array, and fluidics. It also includes a section on nanotechnology applications and a chapter on nanomachining. It also provides both classroom and self-learners with worked-out example problems.
1992 pages, 1887 colour illustrations, 305 black & white tables
| Media | Books Book |
| Released | August 1, 2011 |
| ISBN13 | 9780849331800 |
| Publishers | Taylor & Francis Inc |
| Pages | 1992 |
| Dimensions | 292 × 226 × 111 mm · 5.73 kg |
| Language | English |
