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Microlithography: Science and Technology Bruce W. Smith-Kazuaki Suzuki 3rd edition
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Microlithography: Science and Technology
Bruce W. Smith-Kazuaki Suzuki
Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.
838 pages, 570 Illustrations, black and white
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | June 24, 2024 |
| ISBN13 | 9781032836737 |
| Publishers | Taylor & Francis Ltd |
| Pages | 850 |
| Dimensions | 181 × 256 × 46 mm · 1.52 kg |
| Editor | Smith, Bruce W. (Rochester Institute of Technology, New York, USA) |
| Editor | Suzuki, Kazuaki (Nikon Corporation, Tokyo, Japan) |
