Green Etching Techniques for MEMS Applications: Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems - Kaiying Wang - Books - Taylor & Francis Ltd - 9781041144960 - December 18, 2025
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Kaiying Wang
Green Etching Techniques for MEMS Applications: Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems

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Green Etching Techniques for MEMS Applications delivers an essential and comprehensive exploration of sustainable, fluorine-free etching methodologies for micro-electro-mechanical systems (MEMS).

Media Books     Hardcover Book   (Book with hard spine and cover)
Released December 18, 2025
ISBN13 9781041144960
Publishers Taylor & Francis Ltd
Pages 122
Dimensions 150 × 220 × 20 mm   ·   410 g
Language English  

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