Plasmaunterstutzte Abscheidung und Charakterisierung von Siliziumnitridfilmen - Stefan Zaengler - Books - Grin Verlag - 9783346377319 - June 9, 2021
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Stefan Zaengler
Plasmaunterstutzte Abscheidung und Charakterisierung von Siliziumnitridfilmen

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Media Books     Paperback Book   (Book with soft cover and glued back)
Released June 9, 2021
ISBN13 9783346377319
Publishers Grin Verlag
Pages 56
Dimensions 148 × 210 × 3 mm   ·   96 g
Language German  

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