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Microsystem Technology and Microrobotics Sergej Fatikow 1997 edition
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Microsystem Technology and Microrobotics
Sergej Fatikow
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices.
408 pages, biography
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | March 20, 1997 |
| ISBN13 | 9783540606581 |
| Publishers | Springer-Verlag Berlin and Heidelberg Gm |
| Pages | 408 |
| Dimensions | 156 × 234 × 23 mm · 734 g |
| Language | English |
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