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Ionno-plazmennye Metody Naneseniya Tonkikh Plenok: Magnetronnoe Raspylenie Konstantin Oskomov Russian edition
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Ionno-plazmennye Metody Naneseniya Tonkikh Plenok: Magnetronnoe Raspylenie
Konstantin Oskomov
Kniga posvyashchena probleme naneseniya tonkoplenochnykhpokrytiy razlichnogo funktsional'nogo naznacheniya nashirokoformatnye podlozhki. V ney predstavlen obzorsovremennykh metodov naneseniya pokrytiy sispol'zovaniem nizkotemperaturnoy plazmy. Priopisanii metodov i oborudovaniya dlya naneseniyapokrytiy v vakuume osoboe vnimanie udelyaetsyaustroystvam so skreshchennymi elektricheskim i magnitnympolyami, k kotorym otnosyatsya magnetronnyeraspylitel'nye sistemy i ionnye istochniki s anodnymsloem, chto obuslovleno ikh vozmozhnost'yu sozdavat'odnorodnye protyazhennye potoki plazmy. Pomimo etogo vknige podrobno opisano sovremennoe sostoyanie del voblasti ionno-plazmennogo osazhdeniya almazopodobnykhpokrytiy i privedeny rezul'taty, poluchennye avtoramipri razrabotke tsilindricheskikh magnetronnykhraspylitel'nykh sistem, nanesenii tverdykh uglerodnykhpokrytiy s pomoshch'yu ustroystv so skreshchennymielektricheskim i magnitnym polyami. Kniga prednaznachena dlya spetsialistov, interesuyushchikhsyav razlichnykh aspektakh problematiki pokrytiy imodifitsirovaniya poverkhnosti, a takzhe budet poleznadlya studentov starshikh kursov i aspirantovsootvetstvuyushchikh spetsial'nostey.
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | June 30, 2011 |
| ISBN13 | 9783844353808 |
| Publishers | LAP LAMBERT Academic Publishing |
| Pages | 196 |
| Dimensions | 150 × 11 × 226 mm · 310 g |
| Language | German |