Planar Processing Primer - G. Anner - Books - Springer - 9789401066822 - October 28, 2011
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G. Anner
Planar Processing Primer Softcover reprint of the original 1st ed. 1990 edition

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Planar Processing Primer is based on lecture notes for a silicon planar process­ ing lecture/lab course offered at the University of Illinois-UC for over fifteen years. The text describes and explains, at an introductory level, the principal processing steps used to convert raw silicon into a semiconductor device or integrated circuit.

647 pages, biography

Media Books     Paperback Book   (Book with soft cover and glued back)
Released October 28, 2011
ISBN13 9789401066822
Publishers Springer
Pages 634
Dimensions 152 × 229 × 33 mm   ·   861 g
Language English  

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